JPH0385600U - - Google Patents
Info
- Publication number
- JPH0385600U JPH0385600U JP14712689U JP14712689U JPH0385600U JP H0385600 U JPH0385600 U JP H0385600U JP 14712689 U JP14712689 U JP 14712689U JP 14712689 U JP14712689 U JP 14712689U JP H0385600 U JPH0385600 U JP H0385600U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- beam irradiation
- piping system
- vacuum pump
- circulation pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 238000000605 extraction Methods 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 238000001179 sorption measurement Methods 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14712689U JPH0385600U (en]) | 1989-12-22 | 1989-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14712689U JPH0385600U (en]) | 1989-12-22 | 1989-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0385600U true JPH0385600U (en]) | 1991-08-29 |
Family
ID=31693657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14712689U Pending JPH0385600U (en]) | 1989-12-22 | 1989-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0385600U (en]) |
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1989
- 1989-12-22 JP JP14712689U patent/JPH0385600U/ja active Pending